02 February 2014 9 3K Report

The X-ray Rocking Curve method has been perfected over the past half century to include the ability of examining homo-epitaxial and hetero-epitaxial structures. My interest would be in the possibility of using this method for one to be able to image and quantify the defect type (twin, stacking fault, sub-grain, other) in each VOXEL examined? Be it substrate or epitaxial films.

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