09 July 2022 0 7K Report

Hi all,

Optical microscopy resolution limit is explained by Rayleigh criterion (widely applied). We have noticed that some papers show that Saddle-to-peak ratio should be 81.1% if the structure can be resolved, while others used 73.5%. These values were actually used refering to experiences or the sensitivity of our eyes. The difference between 81.1% and 73.5% is caused by various types of apertures used,.

The question is that "when we image gratings by microscope, should we use 81.1% or 73.5% to finally demonstrate our system resolution?"

Thanks in advance,

Best regards,

Yi

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