I need to increase the critical thickness of silicon epitaxy at low temperature. What are the best ways to achieve this?

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William Senior

http://users.wfu.edu/ucerkb/Nan242/L12-Epitaxy.pdf

https://arxiv.org/ftp/cond-mat/papers/0310/0310508.pdf

http://elib.uni-stuttgart.de/bitstream/11682/2531/1/diss_final.pdf

https://atmos.colostate.edu/ece/faculty/bartels/pdf/journals/ECErab00001.pdf

http://www.diva-portal.org/smash/get/diva2:432734/FULLTEXT01.pdf

Dooyeol Ryu

Thank you very much!