I conducted an experiment of depositing zinc on a glass substrate using dc magnetron sputtering.
and I found through SEM that zinc was deposited as a porous structure under pressures of 100-300 mTorr, Ar 20 sccm, 100 W of power and no substrate heater operation . (Pressure control is difficult due to throttle valve malfunction)
When all conditions were the same except the substrate temperature 175℃, a fibrous structure was founded.
I attached SEM images of these samples.
When the copper thin film was previously deposited, it was dense. What is the difference between zinc and copper? Is it related to adatom mobility and film growth?
and Why is zinc fibrous when the substrate temperature is high?