I'd like to spin coat PDMS on top of SU8 layer. The problem is the adhesion. There are numerous publications showing how to treat PDMS with nitrogen plasma, and then bond it to SU8, but I couldn't find any methods on how to do the the reverse,i.e., how to spin coat a PDMS layer on top of the SU8. Any thoughts or ideas is appreciated!
Best,
Alireza
After coating of SU-8 layer and pre-bake then give a flat UV exposure on entire layer and post bake for proper crosslink. Thereafter treat it in Oxygen plasma for 30-45 sec at low power for surface modification (addition of OH group) which will improve the adhesion of PDMS layer.
See DOI: 10.13140/RG.2.2.21558.29761. Also look up Stanford Microfluidics foundry on youtube. They have videos on how to do this.
thanks a lot for the recommendation Pradip and Harikrishnan. I appreciate it.
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