Hi,
I wanted to cover a large area for EBSD analysis which was not possible with single scan. So I took multiple scans with some area overlap. Can I join thos scans somehow and analyse as a one big scan.
Dear Mahavir Singh , of course you can, while the EBSD scans were recorded in the same conditions.
Some SEM control softwares come with a stitching or tiling function. You can also do it by hand or using some code like the one provided by Pilchak et al, in Matlab:
Article AnyStitch: A tool for combining electron backscatter diffrac...
Some distortions can appear, specially if the area is very large, making difficult or not possible at all a good tiling, to overcome these problems the following paper by Rowenhorst could be useful:
https://www.cambridge.org/core/services/aop-cambridge-core/content/view/S1431927613006193
Some other corrections such as the trapezoidal can be find on the work by Sorensen et al:
https://iopscience.iop.org/article/10.1088/1757-899X/891/1/012021/pdf
A combination of SEM images and EBSD can be used to deal with distortions, as Winiarsky et al show in this paper:
Article Correction of artefacts associated with large area EBSD
You also rely on commercial software packages to analyze EBSD that include the stitching functions, see for example: APEX for EBSD:
https://www.edax.com/products/ebsd/apex-software-for-ebsd
Hope this helps.
This depends on the SEM model and the operating EBSD software. Anyway, scanning large areas with improper step size may achieve low quality or loss fine features.
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