How to EXTRACT the dislocation density in a structure in Silvaco Athena using EXTRACT statement ?

04 December 2019 0 4K Report

I am trying to find out the dislocation density is a Silicon film deposited over SiO2 in Silvaco Athena but the inbuilt ATHENA EXTRACT menu doesn't have the 'dislocation' in its drop-down menu.

I think that one will have to use a Customized Extract statement. I tried to study the DecKBuild manual for the same but wasn't able to grasp the syntax required to do so.

So, if anyone can help me with the proper code to find out the dislocation density distribution, it would be very helpful.

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