I want to simulate thermal stress of SiO2 generated from temperature source like heaters by joule heating.

I have model where SiO2 membrane has heater on top. Because of heater temperature the thermal stress should come in SiO2 membrane. Can anyone give idea of how to calculate thermal stress by CoventorWare or Comsol. I am stuck in both simulation. 

In coventorWare, I am using Electro-thermo-mechanical solver

In Comsol- Joule heating and thermal stress models

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