Hello, I'm fabricating nano-pattern through LIL(laser interference lithography). I want to check the height of pattern sample through SEM, since our lab has it.
I've tried to check the height of the sample using a 45° holder and SEM, but I couldn't verify the height.
How can I analyze height of nano-pattern sample through scanning electron microscopy (SEM)?
Yeon-Woo Cho
You need to either tune the angle of your view to be vertical to the cross-section via rotating your sample stubs (if possible), or as David Mercier suggested, by using reference materials. AFM or TEM grids are possible reference materials.
Yeon-Woo Cho
You need to either tune the angle of your view to be vertical to the cross-section via rotating your sample stubs (if possible), or as David Mercier suggested, by using reference materials. AFM or TEM grids are possible reference materials.
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