I had fabricated a high aspect ratio microchannel (HAR) using SU-8 2050 with the target height of 50 um. I follow the step carefully in the datasheet for SU-8 2050 the MicroChem from the spin coating untill the development. After the development process, I got a T-shape profile or hammer shape profile and undercut, which is far from my target to achieve a good rectangular cross-sectional shape. Is there any advice to prevent this? Any advice will be appreciate.
Thank you.
I found a similar case bsaed on the T-top effect. Thank you.
I have a question, is the exposure affecting this shape? I only following the exposure amount required by the SU-8 datasheet for my thickness.
Yes, overexposure can lead to a quite similar effect, but I would say in lesser amount
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