I am looking for suitable paramteres for the ion milling process with PIPSII (GATAN). The CrN, TiN, TiAlN coatings are to be prepared for the TEM investigations. A hint would be really helpful.
I want to make you aware of the Cross Section Polisher using Argon Ion Beam for Scanning Electron Microscopes, the socalled ion beam milling. This polishing method for extremely small particles is unbeatable compared to conventional mechanical polishing techniques.
You will get the highest surface quality that is possible today. However, the corresponding device is very expensive, but as I said, unbeatable.
You can get details on JEOL Ltd. on the Cross Section Polisher.
Please find enclosed a PDF from Erdman et al. on Precise