I am interested in purchasing a BTO target and sputtering it to make ferroelectric thin films for integrated photonics applications. I was told it's too toxic because of the barium content, but I've seen many papers on sputtering this material with no mention of associated danger.
Does elemental barium or some other toxic compound actually get liberated in the process of sputtering BTO?
How can I safely go about sputtering this material without causing harm to other users of the shared coating chamber in my lab?
What comes to my mind first is dust upon module cleaning: make sure you don't inhale any particles when you open your module.
When sandblasting shielding parts, put on a proper mask, but at least around here an FFP mask is mandatory while sandblasting even for non-toxic compounds, anyway.
- Badges
- Science topic
- Similar topics
- Phytochemistry
- Extracts