Hello, I have questions about XL30 SEM (with tungsten filament). Can
anybody help me with how to correct crossover? You will see in the picture look of my crossover. I trying everything and can't get a circular look. Plus when I change accelerating voltages I need every time to find with gun tilt crossover position, and I want to mention that my maximal magnification is about 5000. Thank you all.
If I remember correctly, you check box "crossower" only when you need to find beam and bring it in the center. All aligning is performed with box "crossower" unchecked. It looks like your SEM is badly misaligned since you can get only x5000 magnification. Follow thoroughly alignment procedure described in your manual. It's a long and tedious work, you need to go through a lot of spot sizes and accelerating voltages. When you properly finish the procedure SEM will remember proper settings for different operating conditions, so that after chaning voltage or beam you would not need to realign your SEM.
Old question, but I'll put in my 2 cents in case you are still struggling.
If you are running a tungsten filament on your system (which is an old XL30 by the look of the interface), then your crossover will appear elliptical, not round like a FEG system. To add to this, if there is a mechanical misalignment at the top of the column (gun area, tetrodes), then your crossover will appear cut off.
Hahaha, yes I am. I do have a misaligned column, and I'm struggling with the alignment procedure because I don't see anything on 60000 that is required when setting astigmatism or some another step, and so on... Thank you for your answers, I thought that it should be round even if it's a tungsten filament.
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