Hi! Mostly for those who have attempted one before: how reliable are COMSOL models of laminar flow and heat transfer in a CVD? There's obviously plenty of parameters, particularly at a molecular level, and lack of system isolation... Are they a good reference for experimental work?
Veronika Cencen
Are you pointing to "Chemical Vapor Deposition" When you say CVD? Please calcify then I can Help.
Dear Veronika Cencen
In order to simulate CVD in COMSOL, you have to use different physics such as Heat transfer, Radiation, Fluid Flow, Mass transfer, chemical reaction and finally Crystal Growth (moving mesh).
Different physics has different accuracy. For example, heat transfer ( Temperature distribution) can be very accurate. In my experience almost > 90% accuracy.
Some physics have less accuracy (such as crystals growth ).
In my view point COMSOL for CVD is accurate enough if "User" has good experience in crystal growth simulation. Finally, I guess you can reach to ~ 80% if you spend enough time for modelling.
The basic idea is to have a precursor and initiator (e.g. MMA and TEA) for deposition on a substrate (likely silicon), and there's a few internal geometries (wafer chuck, heating filaments...) and parameters (initial temperatures, output pressure) that need to be adapted to the approximations we have so far... Being relatively new to COMSOL I did check a few tutorials, and assume I'd have to start in 2D if I want to know what's going on. I don't think I'd need crystal growth, but flow simulation would be great?
Veronika Cencen
I can say heat transfer modelling and fluid flow simulation can be very accurate ( >90%). Just try to consider correct region for flow (Laminar or Turbulence) and try to use accurate thermal properties for materials (thermal conductivity, density, heat capacity, viscosity ...as function of temperature and pressure if needed) . Finally modelling an accurate radiation heat transfer model is a
MUST. Are you going to consider chemical reactions?
Please let me know if you need any more help.
- Badges
- Science topic