09 February 2025 3 5K Report

Dear all,

I am currently spin-coating a 10 wt% polystyrene (Mw = 280,000) solution in anisole onto a silicon wafer. The wafer is pre-cleaned using acetone sonication followed by isopropanol sonication, each for 5 minutes. The spin-coating parameters are:

  • Speed: 2000 rpm
  • Duration: 1 minute
  • Acceleration: 500 rpm/s

I have experimented with different coating volumes, but all resulted in the same surface appearance (see attached image). The procedure follows an exact protocol from a published paper, yet the outcome seems inconsistent with the expected results.

Could anyone provide insights into potential causes for this issue? Any suggestions or troubleshooting advice would be greatly appreciated.

Thank you in advance for your help!

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