Hi everyone, i've etched a PM mark on a 5.1kA Oxide layer and i've been getting lower mark signal strength (~5-10%).
I've been using ma-N 1410 PR type (1um), i noticed discoloration on the marker, and marker look quite faint under scope, unable to focus.
However, before the coating, when inspect under scope is the PM marker etched on the oxide is clear and well-define.
why is this so ? For a 5.1kA trench depth, i need higher PR thickness to cover the marker's trench depth? i measured PR thickness on oxide layer is 1um. Or is it normal to show discoloration on PM marker since the PR is coated on oxide layer ?
Side note: I've a similar 5.1kA oxide with PM marker pattern on it. BUT it was dep with 1kA of silver prior to the next masking layer, using 3.6um of IP5700, pre and post coating image of PM marker is sharp and well-define, no discolouration too. and mark strenght is >100+%.
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