Try to find the stoichiometry and crystallinity of the deposited film using energy-dispersive spectroscopy and XRD, respectively. If the deposited film is oxygen deficient, anneal the film in the presence of an oxygen atmosphere. Otherwise, anneal the film in an inert atmosphere.
Thank you for your answer. I've already annealed 20 min for 200 degree temperature. Also doping Zn with GZO. But after doping the film becomes black colour.