I am depositing thing films on glass (mulitlayers) and annealed them afterwards.
I see some shifts in d-value ranging from 0.0001 angstrom to 0.01 angstrom in different samples and different peaks of same sample also. I have counted this shift considering reference JCPDF card data as zero shift peak position (i.e. d-value)
So, I want to know if I need to interpret my data as a relation of deposition parameter or treatment, how much shift in d-value should I ignore and how much should I consider as actual shift and relate it to compressive or tensile stress in the film ?