Dear all,

1) I am a new to the area of Finite Element Analysis. I want to understand the Finite Element formulation for "MEMS Electrostatic Actuator" that can be applied to any FEA tool (say any open source). Could you please let me know the detailed steps in formulating the Finite Element formalism for the same. Any materials / references will be of good help to me.

2) Also please suggest any good open source FEA tool where I can simulate the same using the FE formalism.

Regards,

Raghu

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