Dear all,
1) I am a new to the area of Finite Element Analysis. I want to understand the Finite Element formulation for "MEMS Electrostatic Actuator" that can be applied to any FEA tool (say any open source). Could you please let me know the detailed steps in formulating the Finite Element formalism for the same. Any materials / references will be of good help to me.
2) Also please suggest any good open source FEA tool where I can simulate the same using the FE formalism.
Regards,
Raghu
Hi Raghu
For the formalism e.g.: https://repository.tudelft.nl/islandora/object/uuid:d62f1300-26e7-4e71-8f88-5ee1fb5491fc/datastream/OBJ/download
for open source fea software this might help:
https://www.researchgate.net/post/What_is_the_best_open_source_finite_element_software_for_mechanical_problems
You can use Ansys althouh it is a commercial software. There you can define a piezoresistive material apt for MEMs modeling. If your model is not too big, you can use the academic version
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