Hi all,
Has any body tried static charge measurement by kelvin probe microscopy or any other technique. I have a thermally grown silicon wafer coated with teflon. I have charged the surface by corona discharge method which entraps the charges in the teflon film. I would like to measure the charge quantitatively by kelvin probe or any other reliable technique. I expect charge should be in the range of 100 pico coulomb or so. Please do let me know how to proceed for this if you have come across some literature or have experience in doing so.
Hi Ankur, I also met the same problem. Have you figured out a way to measure the static charge on the surface? We have an AFM, but it seems still difficult to measure the charge distribution. Thank you for your help!
I think that in stead of measuring the charge using KPFM technique, it's better to measure using standard mode EFM or Enhanced mode EFM )EEFM) (Electrostatic Force Microscopy) which will give you the quantitative distribution of charge. Also, there are plenty of papers for the references.
Here is an articles for reference.
https://hal.archives-ouvertes.fr/hal-00088795/document
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