In the case of sputter coating, if we switch from Platinum (density 21.45 g/cm3) to Copper (density 8.96 g/cm3) for the same thickness of 20 nm, how the metal density difference will affect the coating quality?
Hi,
Based on my understanding, Sputtering is due to momentum transfer between Ar+ (in most of the case) and metallic atoms. As Pt is extremely heavy as compared to Cu, I guess that sputtered Pt atoms will have less energy. Therefore, Pt adatoms will also have a lower energy, so one can expect that coatings will be more porous and/or have smaller grain size.
Hi,
Based on my understanding, Sputtering is due to momentum transfer between Ar+ (in most of the case) and metallic atoms. As Pt is extremely heavy as compared to Cu, I guess that sputtered Pt atoms will have less energy. Therefore, Pt adatoms will also have a lower energy, so one can expect that coatings will be more porous and/or have smaller grain size.
Thank you Prof. Jerome.
So does this means that sputtered Cu layer will be more closely packed, compact and less porous?
the first influence is on deposition rate. second is the affection of argon(Ar+) during the deposition. finally I need said I agree with Jerome Pulpytel .
I think the sputtering paramaters is the key to affect the quality of coating, I agree with Jiaqi Luo.
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