How can I get single layer uniform film using spin coating for Zirconium oxide?

24 November 2019 0 6K Report

I'm using ZrOCl2.8H2O (0.6 M, and 0.3 M)as a precursor and 2-ME as a solvent and I want to get uniform ZrO2 film for a single layer spin coating. However, with a single coating, I'm getting high leakage current density.

Please suggest what should I do to get a uniform ZrO2 film with good electrical properties.

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