I guess that you're an student working on his thesis. Why not put this question to your mentor? He/she is there just for help you on this kind of questions. In short, THERE IS NO EXACT, NOR APPROXIMATE RESPONSE TO YOUR QUESTION. If you're going to built up YOUR deposition system, then you need to look for the many different options you can found on the very abundant literature on this subject. The correct parameters to use will depend on YOUR SYSTEM. If you're going to BUY a SP equipment, then the manufacturer of your system will give you all the necessary information regarding the correct parameters to use. Of course, in either case you need to read a lot about the SP technique. There are many, many articles and book chapters devoted to this process. Google for them (you will find even some of them to download for free). In my humble opinion, if you're learning the basics and applications of the SP process, we don't need to provide to you with some of our papers to inspire you. You need to LEARN about the basics of the process itself, in order to get involved into the physics, chemistry and thermodynamics of the SP. Good luck!