Hi,
I am interested in knowing the following about CaF2 evaporation that is meant to be evaporated in a chamber where other material targets are present at the same time:
Thanks in advance :).
Dear Arkadiusz
why do you want to sputter or e-beam evaporate CaF2? It is very easy to evaporate CaF2 from a tungsten or molybdenum boat by thermal evaporation, we did this in a conventional high-vacuum chamber (ca. 10^-6 mbar base pressure) and it works perfectly. Hope this helps, Dirk
Dear Dirk,
I can not use thermal evaporation as i need 4 sequential layers (one of them a thick layer of CaF2) which is only doable with our ebeam/sputtering evaporator!
You have a devoted machine for this CaF2 or you use it also for other materials? Any cross contamination? Do you clean your evaporator after the CaF2 and with what?
Cheers!
Arkadiusz, no we do not have a dedicated system only for CaF2. We have a multiple purpose deposition system, with two or three thermal evaporation boats. For CaF2, we have removed all other equipment to reduce cross contaminations, but in fact, we did not observed Ca or F traces in films of other materials deposited later in the same setup. The only thing we did is cleaning the current feedthroughs and the connectors for the evaporation boats. In any case, good luck for your trials, Dirk
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