Does anyone know the recipe for bilayer PMMA process. I mean the prebake time after spin coating each layer ?

17 February 2016 1 6K Report

Temperature is around 180 degC. and spin coated @ 4000 RPM for 45 s.

https://www.researchgate.net/publication/269394581_Optimized_graphene_transfer_Influence_of_polymethylmethacrylate_PMMA_layer_concentration_and_baking_time_on_graphene_final_performance

This paper says first layer is annealed 80°C for 15 mins,

second layer just cured at room temp for 30 min

Article Optimized graphene transfer: Influence of polymethylmethacry...

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