"Approaching the Schottky–Mott limit in van der Waals metal–semiconductor junctions"
https://www.nature.com/articles/s41586-018-0129-8
This well-known paper reported that Au atoms deposited on MoS2 by e-beam evaporator can damage the MoS2 thin film, and cause defects. I am not questioning this, but are there any other examples to support this? Did anyone ever encounter similar issues before when depositing metal contact on thin films like graphene or h-BN?
Thanks a lot for your answer!