Anti corrosion coatings for HF envirenment?

28 March 2019 1 6K Report

I have to coat Sapphire windows with reflective dielectric multilayers for Hydrogen fluoride environment. HF pressure inside vacuum chamber is 10 mbar. I have coating material : HfO2, ZrO2, SiO2, Ta2O5, TiO2, Gd2O3 and some other oxide and fluorides.

Please recommend some anti-corrosion coating material from above listed or any other which can work in HF gaseous environment.

Thanks

Raj Tokas

Thanks Goyal Ji

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Science method

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