Why Al2O3 liner cracks when used for evaporation of copper?

23 April 2015 1 6K Report

I am curious to know the physics behind Al2O3 liner cracking when used for evaporation of copper at high temperature in PVD.

Thanks in advance :)

Tasnuva Ashrafee

Thanks you Tillmann for your answer. :) Is there any way around to avoid cracking. e.g. very slow cooling down or very slow heating up? Is there any other parameter involved? Please let me know what do you think.

Thanks again :)

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