Microcapsules are made out of polymer. When doing inspection in SEM, they degrade very fast (cracks appear). We have tried to lower the voltage, but it helps only a little bit. The approximate thickness of Au coating is 20 nm. Maybe increase of that would help? Also focusing on neighbour microcapsule and switching to another similar in height to take picture is based on chance. Or there are some other tips without taking images very fast?
Most SEMs have ability to integrate several fast scans into one picture. Often it can help with beam-sensitive specimens. Last resort - to use lower magnifications.
Are these microcapsulaes contain water? If they have water, you should try to evaporate water using critical point dryer or to try with freeze drying. Then use dried samples for Au coating and SEM analysis.
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