As shown in the attached picture, I found a lot of sphere impurities(100nm) on the surface of the sample. EDS tells the impurities contain Si and O element. Does anyone know how this happens? The copper i used is bought from alfa.
How do you prepare your graphene? - is it a plasma reactor?
Si and O is for me a strong indication of quartz glass - do you have any windows in your reactor made from fused silica or do you also work with silane gas or something similar in the same machine?
Thanks for you answer. The system I used is LPCVD and the reacted gases are methane and hydrogen. I have tried another quartz glass but the problem still exists.