Your deposition can either be done in the vapor phase or liquid phase. For vapor phase you can place your clean and dried sample in a desiccator with a small open vial of your silane overnight. The vapor pressure of the silane is high enough that it will fill the chamber with enough silane for a proper deposition. As for solution phase, you can use toluene as your medium. Depending on what you need (monolayer or a polymerized layer) the toluene should be dry or wet, respectively. The solution can be held at 70 deg C for about 10 - 30 minutes.

To determine whether the reaction occured, contact angle goniometry using water should have a value greater than 90 degrees.

Thanks a lot for the valuable input. I am curious to know why in soution phase specifically toluene is used.

Also I am wondering if a catalyst would be required for the reaction.

Toluene will be able to solvate your ODS well. You could use ethanol if needed. A good catalyst will be an amine base, such as triethylamine. The triethylamine will deprotonate the silanol groups on the surface which will increase the reactivity of the surface.

Have performed the reaction without catalyst and it works quite well. Thanks a lot