I used polyimide tape to fix small samples onto a larger carrier (which fits the machine), then mount the carrier to the machine. But in my case it was a sputtering machine.

Dear Jules 

did  you mean  you use Si as substrate  for your evaporating material or what please?

What is your substrate and what is  your evaporating material which you use? in order to try help 

best regard

Thank you for the replies.

Hamida, I'm using Si as my substrate, evaporating metal (Ti/Cr/Au/etc.) or insulating (SiO2/Si3N4/etc.) layers in following sequences.

Usually I use a lift-off process (AZ nLof) but on the odd occasion I may 'blanket' evaporate. The samples are relatively small (X mm x  Y mm) and have alignment marks on the perimeter so I can't clamp the individual samples in place. Instead I am looking to 'stick' several Si samples to something larger (coverslips, microscope slides or as Yiheng mentioned, a wafer) before clamping in place (see image).

I'm after suggestions for suitable methods of attaching Si to coverslips, microscope slides or wafers. 

Because the samples essentially 'hang' whilst clamped in the evaporator (in contrast to small sputtering systems  where usually the 'target' hangs), the bond needs to be strong, but ideally I need to then be able to recover the sample - (photoresist can be easily removed during lift-off or in extreme cases, Piranha (H2SO4:H202)).

Hope this clarifies things.

Thank you again for the responses. 

Jules

Dear Jules

Thin film deposition is a process whereby materials are deposited on a substrate or onto a lithography sample. This can be achieved in a variety of ways such as sputtering, electroplating, evaporation, or using chemical vapors, depending on project requirements. I will give this  address offers you a range of different thin film deposition techniques and instruments, which are briefly explained. So please read it and build your experiment as the way which your project needs.

http://nanomelbourne.com/thin-film-deposition

hope it help you 

Best regard

Hi Jules,

Our lab uses carbon tape to mount our Si samples both to the metal stage and to clamped glass slides during thermal evaporation and have never had a problem. The bond is strong and it is compatible with high vacuum systems.

Best regards,

Tyler

Tyler,

Thank you so much for your reply. Can you provide a product link?

Kindest regards,

Jules

Jules,

I don't know the exact brand (one roll lasts 5+ years considering the miniscule amount you need to mount a silicon sample), but this company seems to provide what we have:

http://www.2spi.com/catalog/spec_prep/cond_adhes-tapes.shtml

I would purchase the 6mm wide roll.

Best regards,

Tyler

Dear Jules,

Double side Carbon tape is a good idea, but may have limitation on the temperature it can withstand. In case there is no substrate temperature, it is fine.

But thermal evaporation does direct some heat towards the substrates, if evaporation is being done for some time, and while evaporating high melting point materials/

Even kapton tape is good withstand some temperature

In case you have high substrate temperatures:, the best way out is by using conducting silver paste.

In case you have tiny silicon substrates ( say 10 mm x 10mm), then you can stick them up with a good quality conducting silver paste. This is how sample are mounted in a typical pulsed laser ablation technique. Because with PLD technique films have been deposited at very high temperature.

I used to deposit supercoducting and PZT films at very high temperatures in the range ( 900 to 600 deg C.) respectively.  It provides good adhesion, and good thermal conductivity also 

The substrate fixed with silver paste can be easily removed with a fine blade.

Prof. K. Sreenivas

Thank you Prof. Sreenivas,

I like the idea of using silver paste as I expect to later use it for bonding wires to the contact pads.

I have used Kapton tape before but found that on a few occasions it has caused strange contamination (even though evaporation was well within temperatures), it does however do the job of fixing samples in place very well.

Both carbon tape and silver paste look like good options to investigate.

Thank you again.

Jules

Hi Jules. All of these techniques have their strengths and weaknesses. The adhesive on tape may soften and fail during coating, and you would have to clean your samples afterwards if you use silver paste. You could also use small clips to mechanically hold the samples in place. These usually use a small screw to adjust the pressure and you would probably have to get them made in your workshop. They can be fiddly but this method would withstand the temperatures during coating and you wouldn't have to clean the samples afterwards. The down side is the clip will shadow a small area of the substrate. As with any vacuum coating you should also avoid brass screws and other components because zinc will be emitted once the chamber heats up.

I hope this helps.

David

PS. I'm only down the road from you at the Defence Academy just outside Swindon.