For a long time I have been facing a problem in understanding. I am working on synthesis of aligned nanorods by RF sputtering. I studied a paper entitled "Enhancement of photoelectrochemical response by aligned nanorods" by KWANG-SOON AHN and coworkers. In this paper it is mentioned that for the ZnO nanorods synthesis the ambient of nitrogen is necessary. Without nitrogen only ZnO thin film is produced.

Can anyone explain to me the actual role of nitrogen in ZnO nanorods synthesis during RF sputtering? You can get the paper in the attachment.

Thank you

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