We want to make a heater for a sputtering system, where we will put Ar/O2 in order to grow oxides, with total pressure in the range of 10-3 torr or even higher. The heater will be a direct current one.
And it would be nice for the heater filament to survive more than once. I have read that Pt/Rh is quite resistant. But what is best alloy composition?
Juan