What is the best Pt/Rh alloy composition to make a heating filament for an O2 atmosphere?

10 September 2018 0 792 Report

We want to make a heater for a sputtering system, where we will put Ar/O2 in order to grow oxides, with total pressure in the range of 10-3 torr or even higher. The heater will be a direct current one.

And it would be nice for the heater filament to survive more than once. I have read that Pt/Rh is quite resistant. But what is best alloy composition?

Juan

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