There are a number of different protocols, but clearly this is an old one. Depending on your process conditions you may simply want to use a 2% sol'n of APTES in ethanol with 0.5% water. However, there are other silanes that give similar results that are anhydrous see the link, which gives a background and has a practicals section on application recipes: https://www.gelest.com/themencode-pdf-viewer/?file=https://www.gelest.com:443/wp-content/uploads/Goods-PDF-brochures-couplingagents.pdf