PECVD coating of HMDSO at low pressure? Is it possible to increase its thermal stability?

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Gabi Nehme

I used it before and i Ithink it will

Andreas Holländer

have a look here: doi: 10.1002/ppap.201300059

The thermal stability depends on what kind of coating you have (silicone-like, silicon oxide-like). For more details see e.g. "Degradation and Stability of Plasma Polymers" (doi: 10.1142/9781860945380_0007)

By the way, you have an expert very close at Università Milano Bicocca. Ask for Prof. Claudia Riccardi.

I agree with Dr. Hollander.

Vivek Vishwakarma

Thank you for your replies Dr Hollander and Nehme Dr, I am looking into it.