We have a LEO 1530 FESEM (1996) that started showing strange image distortions at magnifications 359 and above 11,000x. When we attempt to go below 359x, the screen blacks out. The gun has 6.6k hours on it, but we have never seen these distortions before (we have changed the gun several times, usually the symptoms are difficulty in turning on the gun and having to adjust the extractor current to get a decent beam. See attached file, basically the image is distorted on the top and right border, this distortion follows any image rotation.
My guess is a bad scanning board. Any other comments will be greatly appreciated.
sincerely,
Michael Delannoy
The problem turned out to be failure of the 24 volt power supply. Thank you for the input.
It was the 24 volt power supply, been fixed all is good now.
thank you
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