Sheet resistance can be calculated by resistivity/thickness, this is true for pure metal. However, in real case, even if the thickness is large enough to eliminate microstructure effect, there are still oxidation and defect influence. I have once seen sheet resistance vs thickness curves for various metal thin films but can not find that now. Can anyone help on this?
Dear Dr. Jijun Lao,
I suggest you to have a look at the following thesis of PhD by Dr. John Garth Swanson, “ELECTRICAL PROPERTIES OF THIN METAL FILMS” (University of London, 1967), available at: https://spiral.imperial.ac.uk/bitstream/10044/1/17586/2/Swanson-JG-1967-PhD-Thesis.pdf
My best regards, Pierluigi Traverso.
Dear Dr. Jijun Lao,
I suggest you to have a look at the following thesis of PhD by Dr. John Garth Swanson, “ELECTRICAL PROPERTIES OF THIN METAL FILMS” (University of London, 1967), available at: https://spiral.imperial.ac.uk/bitstream/10044/1/17586/2/Swanson-JG-1967-PhD-Thesis.pdf
My best regards, Pierluigi Traverso.
Dear all, please find these RG links and the attached files dealing with electrical resistivity. If you specified the film (sheet) composition, you get more specific contributions. My Regards
https://www.researchgate.net/post/What_is_the_effect_of_film_thickness_on_electrical_properties_of_al-doped_ZnO_films
https://www.researchgate.net/publication/312462151_Thickness_dependence_of_the_resistivity_of_Platinum_group_metal_thin_films
https://www.researchgate.net/post/Any_advice_on_the_measurement_of_resistivity_of_ultra-thin_metal_films
http://four-point-probes.com/sheet-resistance-and-the-calculation-of-resistivity-or-thickness-relative-to-semiconductor-applications/
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