Actually I don't get to do PLD often so I can't do try and error many times, so I want to know the best suitable energy required for my specific target and substrate with minimum time. And I think the pulme shape with respect to target and substrate could give me some idea about the required energy as well as the film quality.
All answers are highly appreciable. Thank you
Dear Krishna.
What schema of PLD do you use? Plasma plume have been spherical shape in the vacuum. It means that velocity of the plume border propagation is proportional of the particle energy (same in all direction in vacuum). And energy of particle is proportional of absorbed laser energy.
Thank you Alexey, I use KrF excimer laser in my PLD, During deposition we can see one plume (like ballon), I want to know for best film growth where should the balloon shaped plume be placed between target and substrate?
@Martin: Target: TiO2; Spot size: 1*2 mm2; Laser energy range: upto 700 mJ
I mostly did my PLD with a Nd:YAG laser quite successfully.
No doubt it had a much smaller plume compared to the other commonly used lasers. Ensured the substrate temperature , alongwith the oxygen pressure in the chamber was stable. Target should be dense enough.
Substrate to target temperature was quite critical. Whenever the substrate was well immersed in the plume, we obtained very good films. Laser warm up period was pimportant, and the deposited energy onto the target should be quite stable, and calibrated before every run. The target required scraping every time, before I made a run. and the substrates whould be epitaxially matched, and well cleaned, and properly mounted with a good quality silver paste.
K. Sreenivas
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