Hello RG community,

currently I am trying to reach these goals on silicon surfaces for a microfludic project. I have used silanes like APTES in the past in order to get my si-surface hydrophobic but since I deal with cells and biomolecules I think that these substances could be way to cytotoxic. Or at least it makes my silicon surface bioincompatible in general which is not optimal for biomedical cell processes.

Does somebody have an idea? Maybe I am not correct with avoiding silanes. Please correct me if so.

I have read about using CH4, CF4 or SF6 plasma. Has somebody used something like that in the past and can recommend it?

Kind regards,

Karl T

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