Ellipsometric data analysis is based on a model. From ellipsometric measurements, you get pairs of psi and delta angles. Based on the structure of specimen, you construct a model structure. The modeled structure can be as simple as ambient/surface-overlayer/bulk (3-phase model), but it can be much more complicated. Then, you fit your model to the experimental data to obtain optical functions such as complex dielectric functions or complex refractive indices.
If you have MSE (Mean Square Error), then it means that you already have a modeled structure and fit it to your ellipsometric data, right?
MMSE is a model based technique. Info such as materials, film stacks and nominal thicknesses, AOI should be available. Theoretical dispersion models can be floated to get n&k like Harmonic oscillators and Tauc-Lorentz are the most common . MMSE needs the right input to provide an accurate output.
You mean Muller matrix? If you mean muller matrix, consider what kind of your sample is. If it is an isotropic sample, easy with Psi&Delta derived by the Muller matrix.If it is a very complex sample which may have 6 elements of epsilon. Then you need at least 2 samples with 3 different measurements