The cantilever is trapezoidal shaped with non uniform substrate thickness. Piezoelectric layer, and electrode layers are uniform. I want to learn the the possible fabrication steps such kind of cantilever.
Bernard Garnier
Dear Anand, I am not sure to understand your question, but the steps might be:
- build the rod
- rectify if necessary the surface where you want to create your piezo substrate,
- bond the piezo layer (a ceramic or piezo-composite plate? Film?) and the electrodes, if not already done by the manufacturer,
- bond insulant layers where necessary,
- bond the piezo-assembly to the rod...
If you have to heat the sample during the bonding process, be careful to not exceed the depolarization temperature of your piezo-material!
1 votes
1 thanks
- Badges
- Science topic
- Similar topics
- Engineering
- Electrical Engineering
- Electrodes
More Ashutosh Anand's questions See All
Similar questions and discussions