Unfortunately the sputtering system in my department is down and I need to prepare some thin films of Titanium oxide , Copper oxide and tungsten oxide. if any one can collaborate in this regard kindly contact me as soon as possible.
Hi Mir,
We do have a sputter system here (EnSol AS). We have some experience with reactive sputtering for titanium oxide and also copper oxides, though it can be very challenging to get a particular stocheometry. We have not tried tungsten oxide, the metal is very hard to sputter, so I would suspect it had to be done with the oxide target and Radio Frequency. You could also try contacting: K. Sreenivas as he is quite active on here and a great expert in the field. Prof. Peter Kelly's group in Manchester has also excellent sputtering facilities and knowledge. https://www2.mmu.ac.uk/amse/staff/
Best of luck,
Phil
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