How to simulate Fluorine ion implantation in silvaco??

Kim Young Hoon @Kim-Young-Hoon-4

15 December 2022 0 319 Report

Hello I'm a student who wants to implant Fluorine in GaN.

But, Before I real process this one, I want to see the Doping Profile of Fluorine in Athena.

But, there is no F ion source so I replace with BF2 doping source (which is on example)

to implant F ion.

But I still have a hard time to simulation...

So I upload this question...

Question 1. When I simulate with BF2 I can select the Boron Concentration But I can't find the Fluorine Concentration so, how can I figure out the fluorine Concentration with the BF2 or can you recommand another method...

Question 2. So I arbitrarily input the fluorine ion instead of example but when I saw the results from Tonyplot there was difference between example ion and fluroine like the graph. when I change the Energy, Dose but F ion profile didn't change...

What is better to do

Thank you for see my question

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