23 December 2023 4 7K Report

Dear Colleaguse,

We are trying to simulate the XRR nanolayers to get information about the density parameters of PS films on Si substrate.

And I found that no matter how I adjusted the parameters of PS film and the substrate, I could not make the first half of the fitted image match the shape of the data. I tried to change the density of the Si substrate, but to get a better fitting curve would more than double the density of the substrate, which I don't think is right.

Does anyone have an idea of where is the problem, and what we have to change/modify to get a better simulation?

Thanks in advance.

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