How to deposit amorphous BN thin film by radio frequency magnetron sputtering?

Pritam Das @Pritam-Das-7

06 January 2016 1 4K Report

I am using BN target and working in Ar & N2 environment.

Please suggest any article.

Erik Strub

I hope this paper can give you some hint.

Article Characterization of PECVD boron carbonitride layers

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