HZO thin film (thickness is less than 15 nanometers), how to determine the phase structure? (like monoclinic, orthorhombic, tetragonal and so on). It seems too thin to messure.
As the film is very thin on a substrate, you may try glancing angle X-ray diffraction.
It seems to be difficult to characterize by XRD. I think some optical test methods, such as second harmonic generation, raman, would be more useful.
If you can deposit your ultra thin-films on NaCl substrates, and lift them off by gently dipping the substrate in water, and pick up the floating film onto TEM grids, then you can try studying them through Transmission electron microscopy through selective area electron diffraction (SAED)
TEM is indeed a good method to characterize phase structure. Is there a cheaper or easier method? K. Sreenivas
In case you are making epitaxial HfZrO2 films on Si or some single crystal substrates, then in that case you have to make a cross-sectional TEM specimen. if I come across a much simpler technique I would let you know.
I am very glad to have your help and your advice is very useful. K. Sreenivas
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