Here are three articles from a long list after a search Google Scholar. The details you need are certainly addressed by such articles.
Article Chemical Analysis of Graphene Oxide Films after Heat and Che...
Article The Chemistry of Graphene Oxide
Article Synthesis of Graphene-Based Nanosheets via Chemical Reductio...
Hi Aviru.
Probably you will need to perform the deconvolution of the carbon signal. I suggest you read some papers about graphene oxide (eg. those proposed by Jeffrey) in order to find the precise values of the binding energies for carbon atoms in COH, COOH and other functional groups on GO.
Basically,
1) you apply a background (mostly Shirley).
2) then integrate the peak area (best done by fitting with GL functions)
3) correct those areas for the cross section of element and core level, inelastic mean free path and your setup.
That's it ;-) Sounds simple, but XPS evaluation is quite complex as you have to take a lot of different effects into account. Sadly there are many publications with more or less drastic errors in their XPS evaluations...
The CasaXPS (evaluation software) gives a very nice hand instruction, which is probably easier to start with than normal publications:
http://www.casaxps.com/help_manual/manual_updates/Basics_Quantification_of_XPS_Spectra.pdf
also, question has been asked here a few times before:
https://www.researchgate.net/post/How_can_I_calculate_the_atomic_percentage_at_in_XPS
https://www.researchgate.net/post/How_to_calculate_the_ratio_of_elements_in_XPS
One more thing, for the future I would recommend to either to some more research on your own (you could have found all the links in this thread rather easily yourself). If there is to much information and you have trouble deciding which of the countless webpages, books etc to read that's totally valid, but please write this down in your question and also provide some more information on what exactly you what to do, need to accomplish...
Cheers
Sven
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