I am trying to analyze some ellipsometry measurements done on the reverse side of a sample (Ag absorbing film deposited on transparent glass). To avoid the top surface reflection from the sample (air-glass interface) reaching the detector, a thicker glass (thickness of 6 mm) substrate was used. Any suggestions to select the layers in the optical model for reverse side ellipsometry data would be highly appreciated.
You can look here, http://www.sciencedirect.com/science/article/pii/0040609094902887. If you are doing reverse measurement, then shouldn't a thinner glass be used as that will allow more reflection from film/glass interface ?
Thanks. It would be hard to separate the top surface and back surface reflection when it comes to a thin glass substrate. However, it is still possible if you can work with focus probes attached.
Dear,
I don't know if complete ease can do this "non ideal" modeling but Wvase and deltapsi2 softwares can do.
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